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Phase 5: AI/ML in SemiconductorsSubject 17
Defect Detection & Classification
Use computer vision and deep learning to automatically detect, classify, and root-cause wafer defects — replacing manual review.
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0 of 4 chapters completeChapters
1
Defect Types in Fabs
Particles, pattern defects, systematic vs random, and their impact on yield
2 sections
2
Image-Based Detection
CNN architectures, SEM images, and wafer map classification
1 section
3
Classification & Root Cause
Multi-class classification, spatial signatures, and equipment fingerprinting
1 section
4
Production Systems
ADC systems, integration with inspection tools, and continuous learning
1 section