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Phase 3: Manufacturing Deep DiveSubject 7
Thin Film Deposition
Master the techniques for depositing thin films — CVD, PVD, ALD, and epitaxy — the foundation of building chip layers.
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0 of 4 chapters completeChapters
1
Why Thin Films?
The role of thin films in chip fabrication and the types of films deposited
2 sections
2
Chemical Vapor Deposition (CVD)
LPCVD, PECVD, and the chemistry of depositing films from gases
1 section
3
Physical Vapor Deposition (PVD)
Sputtering, evaporation, and depositing metal films
1 section
4
ALD & Epitaxy
Atomic-precision deposition and single-crystal film growth
2 sections